GEM300 Standards

Implementing GEM300 standards for 300mm wafer fabs.

GEM300 Overview

GEM300 extends the base GEM standard for 300mm wafer manufacturing.

Supported Standards

E40 - Process Job Management

Manages wafer processing jobs:

Job creation and queuing

Job state management

Recipe assignment

Material tracking

E87 - Carrier Management (CMS)

Tracks carriers (FOUPs) and load ports:

Carrier ID verification

Load port state management

Access mode control

E90 - Substrate Tracking

Individual wafer tracking:

Substrate location

Processing history

Substrate state

E94 - Control Job Management

High-level job orchestration:

Multi-equipment coordination

Job dependencies

Priority management

E116 - Equipment Performance Tracking

OEE metrics collection:

State duration tracking

Availability calculation

Performance metrics

Configuration Example

gem300:
  e40:
    enabled: true
    max_jobs: 100
  e87:
    enabled: true
    load_ports: 2
  e90:
    enabled: true
  e94:
    enabled: true
  e116:
    enabled: true
    collection_interval: 60