GEM300 Standards

GEM300 Overview

GEM300 extends the base GEM standard for 300mm wafer manufacturing.

Supported Standards

E40 - Process Job Management

Manages wafer processing jobs:

• Job creation and queuing
• Job state management
• Recipe assignment
• Material tracking

E87 - Carrier Management (CMS)

Tracks carriers (FOUPs) and load ports:

• Carrier ID verification
• Load port state management
• Access mode control

E90 - Substrate Tracking

Individual wafer tracking:

• Substrate location
• Processing history
• Substrate state

E94 - Control Job Management

High-level job orchestration:

• Multi-equipment coordination
• Job dependencies
• Priority management

E116 - Equipment Performance Tracking

OEE metrics collection (SEMI E116):

• State duration tracking
• Availability calculation
• Performance metrics

Configuration Example

gem300:
  e40:
    enabled: true
    max_jobs: 100
  e87:
    enabled: true
    load_ports: 2
  e90:
    enabled: true
  e94:
    enabled: true
  e116:
    enabled: true
    collection_interval: 60